On the use of Kalman filters for high-order mode rejection in PZT-based microscanners

Journal of Micromechanics and Microengineering
PAPER • THE FOLLOWING ARTICLE ISOPEN ACCESS
On the use of Kalman filters for high-order mode rejection in PZT-based microscanners
Paolo Frigerio3,1, Sara Cozzi1, Luca Molinari2, Andrea Barbieri2, Roberto Carminati2, Massimiliano Merli2 and Giacomo Langfelder1

Published 6 March 2023 • © 2023 The Author(s). Published by IOP Publishing Ltd
Journal of Micromechanics and Microengineering, Volume 33, Number 4
Citation Paolo Frigerio et al 2023 J. Micromech. Microeng. 33 044002
DOI 10.1088/1361-6439/acbda8
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Abstract
This work discusses and compares two strategies for closed-loop control of quasi-static silicon mirrors for raster-scanning applications, actuated by thin films of lead–zirconate–titanate and with embedded piezoresistive angular displacement sensors. A first feedback control approach, based on piezoresistive readout of the device angular displacement through an integrated sensor, shows limitations related to high-order resonant modes of the mechanical structure. To overcome this issue, a feedback control scheme based on the use of a Kalman filter to estimate the angular displacement and velocity of the scanner is presented, achieving a maximum positioning error of 0.14∘ (1.75% of a 8∘ full-scale angular displacement), and a mean error within $\pm 0.03^\circ$ (0.74% peak-to-peak) over 80% of the scanned trace.