Items where Author is "Shafai, Cyrus"

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Article

Allameh, Mehdi and Zhou, Yu and Chen, Tao and Chrusch, Dwayne and Park, Byoungyoul and Shafai, Cyrus (2023) Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications. Journal of Micromechanics and Microengineering, 33 (3). 035008. ISSN 0960-1317

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