Items where Author is "Avila, Miguel Angel Badillo"

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Article

Plaza, Alejandro and Maspero, Federico and Cuccurullo, Simone and Pavese, Giulia and Avila, Miguel Angel Badillo and Bertacco, Riccardo (2023) Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS. Journal of Micromechanics and Microengineering, 33 (7). 077001. ISSN 0960-1317

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